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Plug-and-Play GEM/GEM300 SEMI Compliance Modules
Eternix simplifies SEMI compliance with a modular GEM/GEM300 solution that eliminates the need for major system rewrites. Our plug-and-play components integrate seamlessly into existing control architectures, allowing you to adopt only the features you need — from E84 handshakes to HSMS communication and event handling. Designed for speed, scalability, and reliability, Eternix enables rapid, standards-driven integration across any platform with minimal development effort.
- Swift E84 compliance through a quick plug-in for load-port and carrier transfer
- Configurable, scalable, and future-ready components enabling a compatible system
- Individual modules like E87 (Carrier Management), E90 (Substrate Tracking), and E30 (GEM)
- New standard integration without the need for a complex and complete system rewrite.
It’s all about catering to your demands
Whether it is E84 or E87, we prioritise and customise your needs and deliver modular solutions. Besides, the plug-and-play modules save development hours and reduce Herculean engineering efforts in achieving SEMI compliance. Hence, there is no re-architecture. The outcome is efficient equipment that meets all factory acceptance requirements.